Tunable Components : Combination of DelfMEMS and IPDIA technologies

Numerous applications, such as adaptive matching networks or tunable filters, can benefit from RF MEMS technology. The goal is to answer cost and size challenges for large volumes consumer electronics market. Concerning yield and size, the combination of low cost IPD (Integrated Passive Devices) and ohmic RF MEMS switches is an industrial midway stage towards CMOS compatible RF MEMS technology. This abstract shows first results concerning such combination of IPD and RF MEMS technologies, through the implementation of a band-stop filter. Principle, process compatibility and first measurements are presented hereby.