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DelfMEMS was @ MEMSwave 2010. We are pleased to share our presentation concerning Forced OFF-State for Switching Reliability of Low Actuation Voltage RF MEMS Electrostatic Switch. Abstract : RF MEMS switch with low-voltage actuation is feasible by lowering the gap between the mechanical membrane and the contact area. However, lowering the gap decreases the  reliability of switches, in particular in case of stiction, self actuation or rebound linked to low restoring force. This paper presents a switch based on an anchorless membrane actuated by two pairs of electrodes which enable a forced off-state an thus avoid above-noted unwanted phenomena. The benefits of the structure on switching behaviour are studied, especially during the opening of the switch


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